JPH0272906U - - Google Patents
Info
- Publication number
- JPH0272906U JPH0272906U JP15164788U JP15164788U JPH0272906U JP H0272906 U JPH0272906 U JP H0272906U JP 15164788 U JP15164788 U JP 15164788U JP 15164788 U JP15164788 U JP 15164788U JP H0272906 U JPH0272906 U JP H0272906U
- Authority
- JP
- Japan
- Prior art keywords
- light
- thin film
- position sensor
- micro
- segments
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 3
- 239000006059 cover glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15164788U JPH0272906U (en]) | 1988-11-21 | 1988-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15164788U JPH0272906U (en]) | 1988-11-21 | 1988-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0272906U true JPH0272906U (en]) | 1990-06-04 |
Family
ID=31425874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15164788U Pending JPH0272906U (en]) | 1988-11-21 | 1988-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0272906U (en]) |
-
1988
- 1988-11-21 JP JP15164788U patent/JPH0272906U/ja active Pending